Innovations Item Code: IN-2024-2100406
Sector: Fabrication and Manufacturing
Description:
In the fabrication of nanodevices, Atomic Layer Deposition (ALD) stands out as a specialized technique capable of producing thin films with uniform thickness on three-dimensional geometries. This innovation proposes an intelligent, portable atmospheric-pressure-based ALD system with remote control and monitoring of processes and system conditions through a mobile and cloud application. It also offers possibilities for gaining insights into processes and chamber conditions using data analytics and machine learning.
Stage of Innovation: Idea (You have thought it through and documented it)
Problem:
The problem here is twofold. Firstly, current ALD systems typically operate at low pressure, necessitating the use of expensive vacuum pumps. Secondly, in cleanroom environments where ALD systems are utilized, processes are often manually monitored, which can be laborious and inefficient.
Unique Selling Point: Most commercial ALD systems are vacuum-based, expensive, and have the capability to monitor processes in situ, but with limited remote monitoring possibilities. Atmospheric pressure ALD systems have the potential to optimize ALD processes in terms of system procurement, maintenance costs, and precursor utilization. However, atmospheric pressure ALD systems are still in the research stage, and there is no integrated approach that combines remote monitoring and control of ALD processes at atmospheric pressure, alongside with tracking the condition of the complete ALD system through data analytics and machine learning. Our innovation is an integrated approach that aims to enhance the ALD system and processes by addressing several key aspects: 1. Optimal chamber design for ALD processes at atmospheric pressure. 2. Implementation of remote control and monitoring capabilities. 3. Provision of process and chamber insights using data analytics and machine learning. 4. Ensuring safety for both humans and equipment involved. 5. Improving efficiency, user-friendliness, and accessibility of the system.